ELECTRON-BEAM-HEATED SOLID SOURCE FOR CARBON DOPING IN GAAS AND ALGAAS ALLOYS GROWN BY MOLECULAR-BEAM EPITAXY

Authors
WALKER JF SORBA L DEFRANCESCHI S BELTRAM F
Citation
Jf. Walker et al., ELECTRON-BEAM-HEATED SOLID SOURCE FOR CARBON DOPING IN GAAS AND ALGAAS ALLOYS GROWN BY MOLECULAR-BEAM EPITAXY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 287-289
Citations number
8
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
2
Year of publication
1995
Pages
287 - 289
Database
ISI
SICI code
1071-1023(1995)13:2<287:ESSFCD>2.0.ZU;2-N