FABRICATION OF AN ULTRASHARP AND HIGH-ASPECT-RATIO MICROPROBE WITH A SILICON-ON-INSULATOR WAFER FOR SCANNING FORCE MICROSCOPY

Authors
ITOH J TOHMA Y KANEMARU S SHIMIZU K
Citation
J. Itoh et al., FABRICATION OF AN ULTRASHARP AND HIGH-ASPECT-RATIO MICROPROBE WITH A SILICON-ON-INSULATOR WAFER FOR SCANNING FORCE MICROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 331-334
Citations number
9
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
2
Year of publication
1995
Pages
331 - 334
Database
ISI
SICI code
1071-1023(1995)13:2<331:FOAUAH>2.0.ZU;2-H