PREPARATION AND CHARACTERIZATION OF TRANSPARENT CONDUCTING TIN OXIDE THIN-FILM ELECTRODES BY CHEMICAL-VAPOR-DEPOSITION FROM REACTIVE THERMAL EVAPORATION OF SNCL2

Authors
YADAVA YP DENICOLO G ARIAS AC ROMAN LS HUMMELGEN IA
Citation
Yp. Yadava et al., PREPARATION AND CHARACTERIZATION OF TRANSPARENT CONDUCTING TIN OXIDE THIN-FILM ELECTRODES BY CHEMICAL-VAPOR-DEPOSITION FROM REACTIVE THERMAL EVAPORATION OF SNCL2, Materials chemistry and physics, 48(3), 1997, pp. 263-267
Citations number
17
Categorie Soggetti
Material Science
Journal title
Materials chemistry and physics → ACNP
ISSN journal
02540584
Volume
48
Issue
3
Year of publication
1997
Pages
263 - 267
Database
ISI
SICI code
0254-0584(1997)48:3<263:PACOTC>2.0.ZU;2-Y
Abstract
A chemical vapour deposition technique has been developed for highly t ransparent conducting tin oxide thin films from the reactive thermal e vaporation of SnCl2. We have demonstrated that good quality tin oxide thin films for electrode application in electronic devices can be prod uced by such a technologically simple and inexpensive way. Best result s concerning optical transmittance, electrical conductivity and crysta llinity (SnO2) were obtained in this way at substrate temperatures in the range of 500-550 degrees C.