NEW FABRICATION METHOD OF SILICON FIELD EMITTER ARRAYS USING THERMAL-OXIDATION

Authors
UH HS LEE JD
Citation
Hs. Uh et Jd. Lee, NEW FABRICATION METHOD OF SILICON FIELD EMITTER ARRAYS USING THERMAL-OXIDATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 456-460
Citations number
13
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
2
Year of publication
1995
Pages
456 - 460
Database
ISI
SICI code
1071-1023(1995)13:2<456:NFMOSF>2.0.ZU;2-I