ELECTRON-BEAMING INDUCED DEPOSITION FOR FABRICATION OF VACUUM FIELD EMITTER DEVICES

Authors
WEBER M RUDOLPH M KRETZ J KOOPS HWP
Citation
M. Weber et al., ELECTRON-BEAMING INDUCED DEPOSITION FOR FABRICATION OF VACUUM FIELD EMITTER DEVICES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 461-464
Citations number
15
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
2
Year of publication
1995
Pages
461 - 464
Database
ISI
SICI code
1071-1023(1995)13:2<461:EIDFFO>2.0.ZU;2-5