SURFACE CHEMICAL-ANALYSIS - COMPARING AND EXCHANGING DATA

The current status of repeatability and reproducibility in interlabora tory studies in surface analysis using Auger electron spectroscopy (AE S), x-ray photoelectron spectroscopy (XPS), dynamic and static seconda ry ion mass spectrometries (SIMS), and sputtering are briefly reviewed . Repeatabilities are governed by the quality of the instrument design and the procedure for instrument use. Reproducibility from laboratory to laboratory requires the use of transfer standards which may be tec hnique wide, as in the cases of AES and XPS, or sample specific as in the case of dynamic SIMS. Repeatabilities of intensity ratios with goo d instruments and procedures should be better than 2% for all techniqu es for suitable samples. Repeatabilities of the energy scale in good e lectron spectrometers average around 0.025 eV. The reproducibilities i n quantification have improved to around 10% relative standard deviati on, The measurement infrastructure is developing well and it needs to be reinforced by the relevant documentary standards to enable analysts to transfer and exchange data, at the above levels, and to improve it where necessary. The analyst needs methods of validating both equipme nt and software and the laboratory management, in rum, needs methods o f testing the analyst's proficiency. These aspects need development of appropriate documentary standards, as pioneered by ASTM Committee E-4 2 on Surface Analysis and, at an international level, by the Internati onal Standards Organization Technical Committee 201 on Surface Chemica l Analysis, (C) 1997 American Vacuum Society.