ATOMISTIC SIMULATIONS OF THE NANOMETER-SCALE INDENTATION OF AMORPHOUS-CARBON THIN-FILMS

Authors
SINNOTT SB COLTON RJ WHITE CT SHENDEROVA OA BRENNER DW HARRISON JA
Citation
Sb. Sinnott et al., ATOMISTIC SIMULATIONS OF THE NANOMETER-SCALE INDENTATION OF AMORPHOUS-CARBON THIN-FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 936-940
Citations number
39
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
15
Issue
3
Year of publication
1997
Part
1
Pages
936 - 940
Database
ISI
SICI code
0734-2101(1997)15:3<936:ASOTNI>2.0.ZU;2-G
Abstract
Molecular dynamics simulations are used to examine the nanometer-scale indentation of a thin film of amorphous carbon with a nonrigid sp(3) bonded carbon tip. The simulations show in detail the atomic-scale mec hanism of the indentation process and compare the bonding character of the film before and after indentation. The computationally determined elastic modulus of the amorphous-carbon film is found to be 243 GPa, in good agreement with experiment. (C) 1997 American Vacuum Society.