GROWTH-MECHANISM AND STRUCTURAL STUDIES OF SPUTTERED PBTIO3 THIN-FILMS

The surface of sputtered PbTiO3 thin films, 5-200 nm in thickness, epi taxially grown on miscut (001) SrTiO3 substrates with miscut angle of 1.7 degrees comprised a periodic striped pattern which was reflected i n the initial surface structure of the substrates. The electron micros copic analysis suggests that the film growth is governed by a step-flo w model which corresponds to Frank-van der Merwe mode. The surface was extremely smooth with surface roughness less than 3 nm for a film thi ckness of 200 nm. The sputtered films showed a homogeneous microstruct ure with three-dimensional epitaxy. The deposition on miscut substrate s realizes the growth of perfect single crystal perovskite thin films, having full in-plane alignment together with a continuous film throug h a large area. (C) 1997 American Vacuum Society.