ELECTROSTATICALLY ACTUATED MICROMECHANICAL SWITCHES

Authors
MAJUMDER S MCGRUER NE ZAVRACKY PM
Citation
S. Majumder et al., ELECTROSTATICALLY ACTUATED MICROMECHANICAL SWITCHES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 1246-1249
Citations number
9
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
15
Issue
3
Year of publication
1997
Part
2
Pages
1246 - 1249
Database
ISI
SICI code
0734-2101(1997)15:3<1246:EAMS>2.0.ZU;2-D
Abstract
Micromechanical switches and relays realized by a simple surface micro machining process are presented. The devices use a nickel cantilever b eam and gold-to-gold electrical contact, and are electrostatically act uated. They have lifetimes exceeding 10(9) cycles, and a current handl ing capability of 150 mA. (C) 1997 American Vacuum Society.