SURFACE MORPHOLOGIES ASSOCIATED WITH THERMAL-DESORPTION - SCANNING FUNNELING MICROSCOPY STUDIES OF BR-GAAS(110)

Scanning tunneling microscopy was used to characterize the developing surface morphology found during typical temperature programmed desorpt ion experiments for halogen-GaAs. Surfaces exposed to Br-2 at 300 K we re heated to temperatures between 450 and 675 K, followed by scanning at room temperature. This made it possible to relate the temperature-d ependent gas phase etch product distribution to the surface structure and thereby examine atomic-level surface processes associated with the evolution of volatile products. We associate the desorption of GaBr3 around 500 K with the initiation of single-layer-deep terrace pits. De sorption of GaBr and As-2 above 600 K accounts for the lateral enlarge ment of the pits. (C) 1997 American Vacuum Society.