Lj. Blue et al., DEPENDENCE OF CURRENT-VOLTAGE CHARACTERISTICS ON AL MOLE FRACTION IN GAAS ALXGA1-XAS ASYMMETRIC DOUBLE-BARRIER STRUCTURES/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(3), 1997, pp. 696-701
The effect of barrier Al mole fraction, 0.2 less than or equal to x le
ss than or equal to 0.8, on tunneling currents has been studied for a
set of asymmetric GaAs/AlxGa1-xAs double barrier structures. The barri
er widths of each sample were scaled so that barrier transmission coef
ficients for different samples should be approximately equivalent at t
he first resonant tunneling peak. Structures were grown by molecular b
eam epitaxy; by adjusting Ga and Al cell temperatures, the full range
of Al mole fractions could be achieved in AlxGa1-xAs barrier layers wh
ile maintaining a nearly constant growth rate of about 1 mu m/h. Curre
nt-voltage measurements are in agreement with theoretical estimates an
d indicate good sample quality. (C) 1997 American Vacuum Society.