IMPROVED DETERMINATION OF MATRIX COMPOSITION OF HG1-XCDXTE BY SIMS

Results are presented to show an improved method for composition chara cterization of HgCdTe heterostructure using secondary ion mass spectro scopy. This method utilizes the molecular ions CsM+ rather than M+/- i ons. The advantage is that the molecular CsM+ ion yield, unlike the at omic M+/- ions, is quite insensitive to the matrix material from which they are emitted. Composition of multilayer HgCdTe structure can be d etermined with excellent accuracy and depth resolution, Layer thicknes s of HgCdTe heterostructure can also be calibrated.