The results of arsenic incorporation in HgCdTe layers grown by molecul
ar beam epitaxy (MBE) are reported. Obtained results indicate that ars
enic was successfully incorporated as accepters in MBE-HgCdTe layers a
fter a low temperature anneal. Secondary ion mass spectrometry and Hal
l effect measurements confirm that arsenic is incorporated with an act
ivation yield of up to 100%. This work confirms that arsenic can be us
ed as an effective dopant of MBE-HgCdTe after a low temperature anneal
ing under Hg-saturated conditions.