DEVELOPMENT OF A SCANNING ATOM-PROBE

Authors
NISHIKAWA O KIMOTO M IWATSUKI M ISHIKAWA Y
Citation
O. Nishikawa et al., DEVELOPMENT OF A SCANNING ATOM-PROBE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 599-602
Citations number
6
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
2
Year of publication
1995
Pages
599 - 602
Database
ISI
SICI code
1071-1023(1995)13:2<599:DOASA>2.0.ZU;2-L