INFOS97 - PROCEEDINGS OF THE 10TH BIENNIAL CONFERENCE ON INSULATING FILMS ON SEMICONDUCTORS - JUNE 11-14, 1997 - STENUNGSUND, SWEDEN - PREFACE

Authors
ENGSTROM O BENGTSSON S
Citation
O. Engstrom et S. Bengtsson, INFOS97 - PROCEEDINGS OF THE 10TH BIENNIAL CONFERENCE ON INSULATING FILMS ON SEMICONDUCTORS - JUNE 11-14, 1997 - STENUNGSUND, SWEDEN - PREFACE, Microelectronic engineering, 36(1-4), 1997, pp. 7-7
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
36
Issue
1-4
Year of publication
1997
Pages
7 - 7
Database
ISI
SICI code
0167-9317(1997)36:1-4<7:I-POT1>2.0.ZU;2-S