NEW-TYPE OF METAL-ION SOURCE - SURFACE-DIFFUSION LI-SOURCE( ION)

Authors
MEDVEDEV VK SUCHORSKI Y BLOCK JH
Citation
Vk. Medvedev et al., NEW-TYPE OF METAL-ION SOURCE - SURFACE-DIFFUSION LI-SOURCE( ION), Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 621-624
Citations number
18
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
2
Year of publication
1995
Pages
621 - 624
Database
ISI
SICI code
1071-1023(1995)13:2<621:NOMS-S>2.0.ZU;2-I