LASER TREATMENT OF V SI STRUCTURES IN ALKANES

Authors
GERASIMCHIK EN CHAPLANOV AM SHIBKO AN
Citation
En. Gerasimchik et al., LASER TREATMENT OF V SI STRUCTURES IN ALKANES, Inorganic materials, 33(6), 1997, pp. 588-591
Citations number
5
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
33
Issue
6
Year of publication
1997
Pages
588 - 591
Database
ISI
SICI code
0020-1685(1997)33:6<588:LTOVSS>2.0.ZU;2-J
Abstract
The phase composition of V films on Si substrates after laser treatmen t in alkanes with a power of 1.5-7.0 W was studied by electron diffrac tion. The electrical properties of the resultant multiphase structures depend on radiation power.