PILOT EXPERIMENTS ON MICROSTRUCTURED LIQUID-METAL ION AND ELECTRON SOURCES

Authors
MITTERAUER J
Citation
J. Mitterauer, PILOT EXPERIMENTS ON MICROSTRUCTURED LIQUID-METAL ION AND ELECTRON SOURCES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 625-629
Citations number
19
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
2
Year of publication
1995
Pages
625 - 629
Database
ISI
SICI code
1071-1023(1995)13:2<625:PEOMLI>2.0.ZU;2-T