We have explored the charge transport mechanisms in six different YBaC
uO semiconducting thin films in the temperature range of 70 K to room
temperature. Two of the samples were deposited on LaAlO3 substrate and
were tetragonal with the composition of YBa2Cu3O6.5 and YBa2Cu3O6.3.
The other four were amorphous as-deposited on Si substrate with and wi
thout a MgO buffer layer, and on an oxidized Si substrate with and wit
hout a MgO buffer layer. Ail tested films exhibited semiconductor-type
resistance vs. temperature characteristics with increasing resistance
as the temperature was decreased. Around room temperature all six sam
ples had thermally activated transport characteristics that was interp
reted as activation of hole-like carriers from localized states around
the Fermi level to extended states. As the temperature was decreased,
two tetragonal samples went through a transition to a variable range
hopping-like conduction. The amorphous ones remained within the therma
lly-activated transport regime in the temperature range of 253 K to 31
8 K, with E-A approximate to 0.2 eV. (C) 1997 Elsevier Science Ltd.