OPERATION AND DEVICE APPLICATIONS OF A VALVED-PHOSPHORUS CRACKER IN SOLID-SOURCE MOLECULAR-BEAM EPITAXY

Authors
CHIN TP CHANG JCP WOODALL JM CHEN WL HADDAD GI PARKS C RAMDAS AK
Citation
Tp. Chin et al., OPERATION AND DEVICE APPLICATIONS OF A VALVED-PHOSPHORUS CRACKER IN SOLID-SOURCE MOLECULAR-BEAM EPITAXY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 750-753
Citations number
14
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
2
Year of publication
1995
Pages
750 - 753
Database
ISI
SICI code
1071-1023(1995)13:2<750:OADAOA>2.0.ZU;2-V