KINETICS OF EVAPORATION OF BARIUM THD PRECURSORS USED FOR ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITION (OMCVD) THIN-FILMS

Various methods have been used to synthesize Ba(THD)(2) and its molecu lar structure has been studied using nuclear magnetic resonance. Compa red with Raman and infrared spectroscopy it was found that NMR is very useful to determine quantitatively the decomposition through aging of Ba(THD)(2). The transport kinetics of Ba(THD)(2) has been studied und er experimental conditions of a OMCVD reactor. It has been found that the freshly prepared Ba(THD)(2) by the reaction of Ba metal with THD l igand in anhydrous conditions with subsequent crystallization from met hanol transported quantitatively without decomposition. A simple model shows that the transport kinetics corresponds to a diffusion controll ed process.