NONDESTRUCTIVE CHARACTERIZATION OF PSEUDOMORPHIC HIGH-ELECTRON-MOBILITY TRANSISTOR STRUCTURES USING X-RAY-DIFFRACTION AND REFLECTIVITY

Authors
ROGERS TJ BALLINGALL JM LARSEN M HALL EL
Citation
Tj. Rogers et al., NONDESTRUCTIVE CHARACTERIZATION OF PSEUDOMORPHIC HIGH-ELECTRON-MOBILITY TRANSISTOR STRUCTURES USING X-RAY-DIFFRACTION AND REFLECTIVITY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 777-781
Citations number
5
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
2
Year of publication
1995
Pages
777 - 781
Database
ISI
SICI code
1071-1023(1995)13:2<777:NCOPH>2.0.ZU;2-J