Mh. Ludwig et al., BRIGHT VISIBLE PHOTOLUMINESCENCE OF SPARK-PROCESSED GE, GAAS, AND SI, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(5), 1994, pp. 3023-3026
High-frequency spark discharges were applied to single-crystalline waf
ers of Ge, GaAs, and Si. The spark-processed (sp-) samples were charac
terized by photoluminescence (PL) and Raman measurements. Strong and s
table luminescence with wavelengths centered at 416 and 525 nm was obs
erved in sp-Ge and sp-Si layers, respectively, when excited with a 325
nm laser beam. A considerable blue shift of the PL (compared to the u
nsparked specimen) was also detected for sp-GaAs with an average peak
wavelength around 500 nm. The Raman Shifts of the spark-processed mate
rials indicate that nanocrystals were formed, having diameters of 3.5-
4 nm for Si and about 6 nm for Ge. A correlation between the PL wavele
ngths, the nanocrystal sizes, and the different semiconductor material
s has been established based on the effective-mass approximation. Maki
ng use of this model the nanocrystallite sizes have been found to rang
e between similar to 3 nm for Si and similar to 5 nm for Ge. The relat
ed wavelengths for optical transitions confirm the PL results. The fin
dings support the quantum confinement model.