F. Okuyama et J. Kato, NOVEL FIBER GROWTH ON AR+-SPUTTERED INP, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(5), 1994, pp. 3054-3056
Fiberlike protrusions with a novel structure were found to grow on mon
ocrystalline InP sputtered with 1-3 keV Ar+ at 100 degrees C. The fibe
rs, which lengthened toward the incident ion beam, were of amorphous I
nP, except at the tip area receiving the highest ion-flux density. The
tip area, including the growth front, was comprised of In and InP sin
gle crystals, the In crystals forming topotaxially in the core of the
very tip. The crystallization at the tip of these fibers was no doubt
attributable to the impact of Ar+ ions, so it may be termed a case of
''ion-induced crystallization,'' which is an inverse process of the io
n-induced amorphization of crystalline semiconductors.