MICRO-INDENTATION RELAXATION MEASUREMENTS IN POLYMER THIN-FILMS

Authors
SHINOZAKI DM LU Y
Citation
Dm. Shinozaki et Y. Lu, MICRO-INDENTATION RELAXATION MEASUREMENTS IN POLYMER THIN-FILMS, Journal of electronic materials, 26(7), 1997, pp. 852-858
Citations number
13
Categorie Soggetti
Engineering, Eletrical & Electronic","Material Science
Journal title
Journal of electronic materials → ACNP
ISSN journal
03615235
Volume
26
Issue
7
Year of publication
1997
Pages
852 - 858
Database
ISI
SICI code
0361-5235(1997)26:7<852:MRMIPT>2.0.ZU;2-U
Abstract
A micro-indenter consisting of a piezo-electric driven flat cylindrica l punch has been used to measure the dynamic mechanical properties of polystyrene films as thin as 50 mu m. The measured viscoelastic respon se was sensitive to the bonding of the polystyrene to an underlying si licon substrate for films which were thinner than one indenter diamete r. The instrument therefore was shown to have practical use in measuri ng the dynamic mechanical response of polymer films, and the strength of bonding between disparate materials.