R. Messier et al., ENGINEERED SCULPTURED NEMATIC THIN-FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 2148-2152
Citations number
27
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
By controlling the angular relation of the substrate surface with resp
ect to the incoming vapor direction in an evaporation deposition syste
m, it is possible to engineer the morphology of thin films. Sculptured
nematic thin films result under low adatom mobility conditions when t
he substrates are rotated about an axis perpendicular to the vapor dir
ection. Thin films of MgF2 were deposited onto room temperature substr
ates to produce columnar morphologies ranging from chevron structures
to continuously varied structures resembling S shapes and C shapes. Th
e specific morphologies are virtually unlimited within the restriction
that the minimum angle chi(M) of the local columnar direction with re
spect to the substrate plane is about 30 degrees. (C) 1997 American Va
cuum Society.