ENGINEERED SCULPTURED NEMATIC THIN-FILMS

Citation
R. Messier et al., ENGINEERED SCULPTURED NEMATIC THIN-FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 2148-2152
Citations number
27
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
07342101
Volume
15
Issue
4
Year of publication
1997
Pages
2148 - 2152
Database
ISI
SICI code
0734-2101(1997)15:4<2148:ESNT>2.0.ZU;2-M
Abstract
By controlling the angular relation of the substrate surface with resp ect to the incoming vapor direction in an evaporation deposition syste m, it is possible to engineer the morphology of thin films. Sculptured nematic thin films result under low adatom mobility conditions when t he substrates are rotated about an axis perpendicular to the vapor dir ection. Thin films of MgF2 were deposited onto room temperature substr ates to produce columnar morphologies ranging from chevron structures to continuously varied structures resembling S shapes and C shapes. Th e specific morphologies are virtually unlimited within the restriction that the minimum angle chi(M) of the local columnar direction with re spect to the substrate plane is about 30 degrees. (C) 1997 American Va cuum Society.