EXTENDED-SPECTRAL-RANGE FOURIER-TRANSFORM INFRARED-ATTENUATED TOTAL-REFLECTION SPECTROSCOPY ON SI SURFACES USING A NOVEL SI COATED GE ATTENUATED TOTAL-REFLECTION PRISM

Authors
RUDKEVICH E SAVAGE DE CAI W BEAN JC SULLIVAN JS NAYAK S KUECH TF MCCAUGHAN L LAGALLY MG
Citation
E. Rudkevich et al., EXTENDED-SPECTRAL-RANGE FOURIER-TRANSFORM INFRARED-ATTENUATED TOTAL-REFLECTION SPECTROSCOPY ON SI SURFACES USING A NOVEL SI COATED GE ATTENUATED TOTAL-REFLECTION PRISM, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 2153-2157
Citations number
14
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
15
Issue
4
Year of publication
1997
Pages
2153 - 2157
Database
ISI
SICI code
0734-2101(1997)15:4<2153:EFIT>2.0.ZU;2-V
Abstract
We show that it is possible to extend the lower limit of the spectral range of Fourier transform infrared-attenuated total reflection (FTIR- ATR) spectroscopy on Si surfaces from 1500 to similar to 850 cm(-1) us ing a Ge ATR prism coated with a thin epitaxial layer of Si, making ac cessible the especially important fingerprint region of organic molecu les. The utility of the ATR prism is demonstrated by collecting FTIR s pectra of several surface terminations of Si (H, oxide, 3-aminopropylt rimethoxysilane, and DNA) that contain peaks in the newly accessible s pectral region. (C) 1997 American Institute of Physics.