ON THE RELATION BETWEEN PREFERENTIAL EMISSION AND BULK COMPOSITION INBINARY ALLOY SPUTTERING

Authors
ZHENG LP LI RS LI SY
Citation
Lp. Zheng et al., ON THE RELATION BETWEEN PREFERENTIAL EMISSION AND BULK COMPOSITION INBINARY ALLOY SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 2431-2433
Citations number
17
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
15
Issue
4
Year of publication
1997
Pages
2431 - 2433
Database
ISI
SICI code
0734-2101(1997)15:4<2431:OTRBPE>2.0.ZU;2-#
Abstract
Under simulated 1 keV Ar ion bombardment at low temperatures, the angu lar distributions of the steady sputter state of Cu-Ni alloys have bee n studied with the help of a dynamic Monte Carlo program. Calculations show the preferential emission of Ni in the near-normal direction, bu t that of Cu at oblique angles. Calculations also show that these pref erential emissions strongly depend on the bulk composition. (C) 1997 A merican Vacuum Society.