IMPROVED DESIGN FOR AN ALUMINUM EVAPORATOR

Authors
KECK HG KOPATZKI E BEHM RJ
Citation
Hg. Keck et al., IMPROVED DESIGN FOR AN ALUMINUM EVAPORATOR, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 2452-2454
Citations number
3
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
15
Issue
4
Year of publication
1997
Pages
2452 - 2454
Database
ISI
SICI code
0734-2101(1997)15:4<2452:IDFAAE>2.0.ZU;2-2
Abstract
The design of a previously described aluminum evaporator is improved i n several important aspects. Special attention is paid to features whi ch permit a thorough degassing procedure. The possibility of determini ng the temperature of the source in the current setup is important for the reproducibility and stability of the evaporator over a wide range of flux rates. (C) 1997 American Vacuum Society.