RELATIVE SENSITIVITY FACTORS OF B RELATED TO SIGE ALLOY COMPOSITION ON SECONDARY-ION MASS-SPECTROMETRY WITH AN OXYGEN PRIMARY ION-BEAM (VOL14, PG 2361, 1996)

Authors
FUJINAGA K
Citation
K. Fujinaga, RELATIVE SENSITIVITY FACTORS OF B RELATED TO SIGE ALLOY COMPOSITION ON SECONDARY-ION MASS-SPECTROMETRY WITH AN OXYGEN PRIMARY ION-BEAM (VOL14, PG 2361, 1996), Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 2456-2456
Citations number
1
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
15
Issue
4
Year of publication
1997
Pages
2456 - 2456
Database
ISI
SICI code
0734-2101(1997)15:4<2456:RSFOBR>2.0.ZU;2-A