SENSOR CONTROLLED LINEAR MOTION OVEN (S-LIMO) FOR GROUP-III FLUX OPERATION

Citation
Pp. Chow et al., SENSOR CONTROLLED LINEAR MOTION OVEN (S-LIMO) FOR GROUP-III FLUX OPERATION, Journal of crystal growth, 175, 1997, pp. 61-65
Citations number
3
Categorie Soggetti
Crystallography
Journal title
ISSN journal
00220248
Volume
175
Year of publication
1997
Part
1
Pages
61 - 65
Database
ISI
SICI code
0022-0248(1997)175:<61:SCLMO(>2.0.ZU;2-I
Abstract
A linear motion Ga source has been constructed and tested for smooth f lux variation, The beam flux can be monitored by sensors such as atomi c absorption, RHEED, and pyrometric interferometry. We demonstrated st able and reproducible operation of the source using sensor feedback. C onstant layer composition can be maintained despite Ga thermal desorpt ion at high temperatures. Arbitrary composition profile can be easily achieved for band gap engineering.