An adaptive run-to-run optimizing controller for linear and nonlinear processes

Authors
Hurwitz, AM Del Castillo, E
Citation
Am. Hurwitz et E. Del Castillo, An adaptive run-to-run optimizing controller for linear and nonlinear processes, RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING, 2001, pp. 91-100
Categorie Soggetti
Current Book Contents
Journal title
RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING → ACNP
Year of publication
2001
Pages
91 - 100
Database
ISI
SICI code