A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

Authors
Ning, Z Moyne, JR Smith, TH Boning, DS Del Castillo, E Yeh, JY Hurwitz, AM
Citation
Z. Ning et al., A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry, RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING, 2001, pp. 101-111
Categorie Soggetti
Current Book Contents
Journal title
RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING → ACNP
Year of publication
2001
Pages
101 - 111
Database
ISI
SICI code