Design and optimization of an optimizing adaptive quality controller, generic cell controller-enabled solution

Authors
Del Castillo, E Yeh, JY Moyne, J Solakhian, V
Citation
E. Del Castillo et al., Design and optimization of an optimizing adaptive quality controller, generic cell controller-enabled solution, RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING, 2001, pp. 191-200
Categorie Soggetti
Current Book Contents
Journal title
RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING → ACNP
Year of publication
2001
Pages
191 - 200
Database
ISI
SICI code