Case study: Furnace capability improvement using a customized R2R control solution

Authors
Hurwitz, A Moyne, J
Citation
A. Hurwitz et J. Moyne, Case study: Furnace capability improvement using a customized R2R control solution, RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING, 2001, pp. 203-217
Categorie Soggetti
Current Book Contents
Journal title
RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING → ACNP
Year of publication
2001
Pages
203 - 217
Database
ISI
SICI code