Enabling generic interprocess multistep control: The active controller

Authors
Chaudhry, N Moyne, J Rundensteiner, EA
Citation
N. Chaudhry et al., Enabling generic interprocess multistep control: The active controller, RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING, 2001, pp. 309-323
Categorie Soggetti
Current Book Contents
Journal title
RUN-TO-RUN CONTROL IN SEMICONDUCTOR MANUFACTURING → ACNP
Year of publication
2001
Pages
309 - 323
Database
ISI
SICI code