HIGH-FREQUENCY CROSS-LINE GRATING FABRICATION

Gratings with the frequency of up to 6000 lines/mm are fabricated usin g the coherent light source of argon laser with the wavelength of 457. 9 nm. The technique of frequency multiplication is developed using a m aster grating with a standard frequency as the basis and modulating th e two symmetrically projected beams to a certain angle. The rotating p oint source holographic interferometry (RPSHI) system is adopted to ob tain large area, high quality gratings without the influence of optica l noises.