Fundamental aspects of silicon oxidation - Introduction

Authors
Feldman, LC
Citation
Lc. Feldman, Fundamental aspects of silicon oxidation - Introduction, SPR S MAT S, 46, 2001, pp. 1-11
Categorie Soggetti
Current Book Contents","Current Book Contents
Journal title
FUNDAMENTAL ASPECTS OF SILICON OXIDATION → ACNP
ISSN journal
0933033X
Volume
46
Year of publication
2001
Pages
1 - 11
Database
ISI
SICI code
0933-033X(2001)46:<1:FAOSO->2.0.ZU;2-P