Structural evolution of the silicon/oxide interface during passive and active oxidation

Authors
Ross, FM Gibson, JM
Citation
Fm. Ross et Jm. Gibson, Structural evolution of the silicon/oxide interface during passive and active oxidation, SPR S MAT S, 46, 2001, pp. 35-60
Categorie Soggetti
Current Book Contents","Current Book Contents
Journal title
FUNDAMENTAL ASPECTS OF SILICON OXIDATION → ACNP
ISSN journal
0933033X
Volume
46
Year of publication
2001
Pages
35 - 60
Database
ISI
SICI code
0933-033X(2001)46:<35:SEOTSI>2.0.ZU;2-C