Vibrational studies of ultra-thin oxides and initial silicon oxidation

Authors
Chabal, YJ Weldon, MK Queeney, KT Esteve, A
Citation
Yj. Chabal et al., Vibrational studies of ultra-thin oxides and initial silicon oxidation, SPR S MAT S, 46, 2001, pp. 143-159
Categorie Soggetti
Current Book Contents","Current Book Contents
Journal title
FUNDAMENTAL ASPECTS OF SILICON OXIDATION → ACNP
ISSN journal
0933033X
Volume
46
Year of publication
2001
Pages
143 - 159
Database
ISI
SICI code
0933-033X(2001)46:<143:VSOUOA>2.0.ZU;2-C