Ion beam studies of silicon oxidation and oxynitridation

Authors
Schulte, WH Gustafsson, T Garfunkel, E Baumvol, IJR Gusev, EP
Citation
Wh. Schulte et al., Ion beam studies of silicon oxidation and oxynitridation, SPR S MAT S, 46, 2001, pp. 161-191
Categorie Soggetti
Current Book Contents","Current Book Contents
Journal title
FUNDAMENTAL ASPECTS OF SILICON OXIDATION → ACNP
ISSN journal
0933033X
Volume
46
Year of publication
2001
Pages
161 - 191
Database
ISI
SICI code
0933-033X(2001)46:<161:IBSOSO>2.0.ZU;2-3