RAPID THERMAL METALORGANIC CHEMICAL-VAPOR-DEPOSITION OF CDTE

We report the epitaxial growth of a single layer of undoped (1 1 1) B- face CdTe on (1 1 1) B-face Cd1-xZnxTe x < 0.04 substrates by means of the rapid thermal metalorganic chemical vapor deposition (RT-MOCVD) t echnique. Growth experiments were performed at 350-480 degrees C and a total pressure of 100 Torr, using dimethylcadmium (DMCd), diethyltell uride (DETe) and diisopropyltelluride (DIPTe) as the metalorganic sour ces, Double crystal rocking curve (DCRC), Secondary ion mass spectrosc opy (SIMS), photoluminescence (PL) and profilometer thickness measurem ents were used to characterize the CdTe epilayer. High growth rates up to 60 mu m/h have been observed, Full width at half maximum (FWHM) of (3 3 3) reflections was 205 arcsec for high growth rate of 60 mu m/h at 480 degrees C.