CHEMICAL BEVELING OF INP-BASED STRUCTURES BY HBR-H3PO4-K2CR2O7 SOLUTION

Authors
SRNANEK R GOMATI ME NOVOTNY I PUDIS D
Citation
R. Srnanek et al., CHEMICAL BEVELING OF INP-BASED STRUCTURES BY HBR-H3PO4-K2CR2O7 SOLUTION, Journal of crystal growth, 179(1-2), 1997, pp. 320-323
Citations number
9
Categorie Soggetti
Crystallography
Journal title
Journal of crystal growth → ACNP
ISSN journal
00220248
Volume
179
Issue
1-2
Year of publication
1997
Pages
320 - 323
Database
ISI
SICI code
0022-0248(1997)179:1-2<320:CBOISB>2.0.ZU;2-E
Abstract
By using HBr-H3PO4-K2Cr2O7 solution, bevels through InP-based structur es were prepared. On InP/InGaAsP structure the bevel angles in the ran ge 3 x 10(-5) to 2 x 10(-4) rad were obtained with good linearity of t he bevel profile. The dependence of bevel angle on the etchant flow sp eed was measured and discussed.