CHEMICAL-VAPOR-DEPOSITION OF NIOBIUM IN THE NB-I-HE SYSTEM - A THERMODYNAMIC STUDY

Authors
GOLUBENKO AN SYSOEV SV STENIN YG TITOV AA
Citation
An. Golubenko et al., CHEMICAL-VAPOR-DEPOSITION OF NIOBIUM IN THE NB-I-HE SYSTEM - A THERMODYNAMIC STUDY, Inorganic materials, 33(8), 1997, pp. 801-805
Citations number
14
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
33
Issue
8
Year of publication
1997
Pages
801 - 805
Database
ISI
SICI code
0020-1685(1997)33:8<801:CONITN>2.0.ZU;2-C
Abstract
Phase equilibria in the Nb-I-He system are studied by thermodynamic an alysis in order to outline the region in which chemical vapor depositi on of niobium is possible. The thermodynamic properties of solid and g aseous iodides are characterized by a variety of investigation techniq ues. The obtained set of standard thermodynamic functions for the Nb-I system makes it possible to determine the compositions of equilibrium vapor and condensed phases at temperatures 273-1273 K over wide range s of Nb : I ratios and total pressures. The calculation results are us ed to plot CVD diagrams in the form of sections through the Nb-I-He ph ase diagram and to optimize the procedure for Wb deposition in the Nb- I-He system. Niobium coatings up to 100 mu m thick are prepared on dif ferent oxide substrates at p(tot) = 10(5) Pa in the temperature range 873-1273 K.