ELECTRICAL-TRANSPORT PROPERTIES OF SILICON DELTA-DOPED AL0.30GA0.70ASSAMPLES SHOWING SUPPRESSION OF THE DX CENTER FEATURES

Citation
Ja. Correa et al., ELECTRICAL-TRANSPORT PROPERTIES OF SILICON DELTA-DOPED AL0.30GA0.70ASSAMPLES SHOWING SUPPRESSION OF THE DX CENTER FEATURES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 870-875
Citations number
34
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
15
Issue
4
Year of publication
1997
Pages
870 - 875
Database
ISI
SICI code
1071-1023(1997)15:4<870:EPOSDA>2.0.ZU;2-#
Abstract
Photoconductivity and photo-Hall density measurements using an infrare d light emitting diode as the light source were carried out on single silicon delta-doped Al0.30Ga0.70As samples as a function of temperatur e. The samples were grown by molecular beam epitaxy at 530 degrees C a nd 600 degrees C, We have studied the effect of etching the cap layer on the electrical transport properties. An observed persistent photoco nductivity effect is explained using a model of parallel conduction in two nearby spatially separated channels. We will present evidence tha t the DX center is not active for nearly ideal delta-doped samples. We have proposed that the DX-center level related to the conduction-band minimum is strongly dependent on the silicon delta-doping density and on the growth conditions. (C) 1997 American Vacuum Society.