MICROELECTRONICS AND NANOMETER STRUCTURES - PROCESSING, MEASUREMENT AND PHENOMENA - PAPERS FROM THE 24TH ANNUAL CONFERENCE ON THE PHYSICS AND CHEMISTRY OF SEMICONDUCTOR INTERFACES

Authors
Citation
De. Aspnes et Je. Rowe, MICROELECTRONICS AND NANOMETER STRUCTURES - PROCESSING, MEASUREMENT AND PHENOMENA - PAPERS FROM THE 24TH ANNUAL CONFERENCE ON THE PHYSICS AND CHEMISTRY OF SEMICONDUCTOR INTERFACES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1018-1018
Citations number
NO
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
15
Issue
4
Year of publication
1997
Pages
1018 - 1018
Database
ISI
SICI code
1071-1023(1997)15:4<1018:MANS-P>2.0.ZU;2-1