T. Yasuda et al., REFLECTANCE-DIFFERENCE STUDIES OF INTERFACE-FORMATION AND INITIAL-GROWTH PROCESSES IN ZNSE GAAS(001) HETEROEPITAXY/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1212-1220
In situ reflectance-difference studies of initial stages of ZnSe growt
h on GaAs(001) surfaces are reported. ZnSe layers with thicknesses les
s than 4 nm were grown by molecular beam epitaxy in both layer-by-laye
r and island-growth modes. It is found that the reflectance-difference
spectra for this thickness range are clearly dependent on ZnSe thickn
ess as well as on the growth mode, This observation indicates that the
surface electronic structure develops with thickness and in a manner
sensitive to the mid-or long-range order of the surface. The interface
-induced peak at 2.8 eV, intensity of which is correlated with the ext
ent of the interfacial Ga-Se bond formation, is pinned during the cour
se of growth, which indicates that atomic rearrangement or mixing at t
he interface is minimal once several monolayers of ZnSe are deposited
on GaAs. (C) 1997 American Vacuum Society.