PRINCIPLE OF ATOMIC GRATING AND ITS APPLICATION IN NANOTECHNOLOGY

We present here a new method using atomic grating fringe to achieve re solution as high as one-tenth of an atomic lattice in nanometrology sy stem. The principle of this method is as follows: by superposing two s canning probe microscope (SPM) atomic images, when one is rotated to a specific small angle, moire fringes will be observed. These moire fri nges have symmetry and larger periodicity than atomic lattice. Compari ng the difference of the fringes obtained before and after sample disp lacement, we can determine the direction and quantity of movement of t he sample within one-tenth of the lattice spacing. This method is suit able to characterizing the stability of the SPM instrument and to sing le atom location and manufacturing. (C) 1997 American Vacuum Society.