DETECTION MECHANISM OF AN OPTICAL EVANESCENT FIELD USING A NONCONTACTMODE ATOMIC-FORCE MICROSCOPE WITH A FREQUENCY-MODULATION DETECTION METHOD

Citation
M. Abe et al., DETECTION MECHANISM OF AN OPTICAL EVANESCENT FIELD USING A NONCONTACTMODE ATOMIC-FORCE MICROSCOPE WITH A FREQUENCY-MODULATION DETECTION METHOD, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1512-1515
Citations number
12
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
15
Issue
4
Year of publication
1997
Pages
1512 - 1515
Database
ISI
SICI code
1071-1023(1997)15:4<1512:DMOAOE>2.0.ZU;2-#
Abstract
By using the noncontact atomic force microscope with a frequency modul ation detection method, the force gradient induced by the optical evan escent field was detected in a high vacuum. We succeeded in measuring the exponential distance dependence of the force gradient induced by t he optical evanescent field. Furthermore, we investigated the incident beam intensity and bias voltage dependence of the force gradient indu ced by the optical evanescent field. We confirmed that the detection m echanism is not photothermal effect but the surface photovoltage effec t. (C) 1997 American Vacuum Society.