FABRICATION OF PROBE TIPS FOR REFLECTION SCANNING NEAR-FIELD OPTICAL MICROSCOPES - CHEMICAL ETCHING AND HEATING-PULLING METHODS

Authors
XIAO MF NIETO J MACHORRO R SIQUEIROS J ESCAMILLA H
Citation
Mf. Xiao et al., FABRICATION OF PROBE TIPS FOR REFLECTION SCANNING NEAR-FIELD OPTICAL MICROSCOPES - CHEMICAL ETCHING AND HEATING-PULLING METHODS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1516-1520
Citations number
21
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
15
Issue
4
Year of publication
1997
Pages
1516 - 1520
Database
ISI
SICI code
1071-1023(1997)15:4<1516:FOPTFR>2.0.ZU;2-A
Abstract
Work is described on the fabrication of uncoated probe tips for reflec tion scanning near-field optical microscopes. A chemical etching proce ss with a rotator, and a simple device to make the tips by a heating-p ulling method without a heating laser are introduced. Both techniques allow some manipulation of the tips. Merits and demerits of these two methods are discussed. Finally, it is suggested that observation of th e far field scattering pattern of the tips can be used to check the us efulness of the tips. (C) 1997 American Vacuum Society.